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KMID : 0381919990290040493
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Korean Journal of Microscopy
1999 Volume.29 No. 4 p.493 ~ p.498
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Microstructural Observation of Phase Change Optical Disk by TEM
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Kim Soo-Chul
Kim Gyeung-Ho
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Abstract
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With increasing demand for fast and reliable, yet economical data storage devices, the role of optical disk technology is becoming more important. In recent years, advanced laser technology combined with new materials has given the competitive edge over the traditional magnetic memory devices both in memory capacity and reliability of data retrieval. Continuing effort is being put into developing smaller and more complex structures for optical disks to increase their memory density. Characterization of such multilayered structure requires not only high spatial resolution for observation but also laborious specimen preparation. In this paper, the method of preparing optical disk specimens for TEM characterization is described in detail. The microstructural features in optical disks observed by TEM are also discussed.
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KEYWORD
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Optical disk, TEM, Sample preparation, ion milling
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